尺寸(长×宽×高)
210mm*250mm*180mm
Sample stage
Gold-plated copper plate
Substrate size
Diameter ≤ 4 inches (100mm)
Heating mode
Ceramic heating ring
Operating temperature
RT-200℃
Liquid drain pipe and waste liquid tank
PTFE
Vacuum chuck
Gold-plated,10mm, 25mm, 55mm
After-sales Service Provided
Online support