部件加工类型
Non-destructive scanning microscope, Ultrasonic scanning microscope
Sink Size
620mm*400mm*150mm
Effective Scanning Range
500mm*280mm*120mm
Maximum Scanning Speed
1000mm/s
Detector Frequency Range
1~230MHz
Motion Mechanism Positional Accuracy
X/Y≤±0.5μm, Z≤±5μm
Repeated Positioning Accuracy
X/Y≤±0.01mm, Z≤±0.02mm