型号
Silcon Alumium Rotary Target
化学成分
90wt% Si + 10wt% Al / 92wt% Si + 8wt% Al
Product name
Sputtering target
Theoretical density
2.36 (g/cm3 )
Metal impurity
Fe≤300,Ni≤100,Cu≤100,Other≤500 Total≤1000
Non-metallic impurity content
O≤6500,N≤1000
Electrical resistivity(Ω-cm)
≤0.1