机器类型
magnetron sputtering coater
Sputtering power supply
DC power supply 500W x2
Magnetron target
2-inch balanced target with magnetic coupling baffle
Main cavity size
325mm Dia.x 410mm
Transition cavity size
150x150x150mm
Cavity material
stainless steel 304
Rotating heating sample table
1 to 20 rpm,up to 500°C
Cooling method
circulating water cooler
Water cooler
water tank volume 9L, flow rate 10L/min
Flow meter accuracy
±1.5% range
Ultimate vacuum
5E-4Pa (with molecular pump)