材质
Ti,TiAlSi,TiAl,Graphite,Zirconium,Cr,Al,AlCrSi,Si
Type of material
Ti,TiAlSi,TiAl,Graphite,CrAl,Zirconium,Cr,Al,AlCrSi,Si
Application
PVD, CVD, vacuum coating
Shape
Tubes or discs, and can be plates
Involved techniques
Sputtering and arc ion plating