Water cooled SUS chamber
Dia.500mm X 490mmH;
Multi arc target
2-set;3inches
Target thickness
50mm,min 20mm
Sample stage
6 hangers,6 hanging points on each hanger
Rotation speed(Sample stage)
Revolution speed 1~20rpm
Mass flow meter
Ar gas 0~200sccm,N2 gas 0~200sccm
Vacuum system
Molecular Pump+rotary Vane Pump
Control system
15 "touch screen configuration control software